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  1. Semiconductor
  2. Sub-fab and facilities

Sub-fab and facilities

Use cases of wafer manufacturing automation in sub-fab processes

Sub-fab processes in semiconductor manufacturing significantly benefit from automation, particularly through real-time monitoring for cost reduction and efficiency enhancement.

Applications

Scrubbers

Discover how advanced monitoring solutions enhance scrubber efficiency, predictive maintenance and production quality.

Chemical delivery system (CDS)

Safe and reliable chemical management from delivery to process tool.

Dry vacuum pump

Improve the availability of your vacuum pump by means of ifm hardware and software solutions for condition monitoring.

Ultrapure water system

Discover how ifm’s advanced sensor technology ensures water quality, equipment availability and production efficiency in ultrapure water systems.

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Wafer manufacturing

Crystal growth and wafer preparation ensure high purity and high-quality end products. Learn how monitoring and maintenance improve product quality.

Semiconductor processing

Semiconductor production relies on precise processes. Real-time monitoring helps reduce defects, improve uptime and enhance product quality.

Topic page semiconductor

Learn how ifm solutions and sensor technology help meet the increasing demand for chips without compromising on safety or quality.